Titel:
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Ribbon-Growth-on-Substrate: status, challenges and promises of high speed silicon wafer manufacturing
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Auteur(s):
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Gepubliceerd door:
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Publicatie datum:
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ECN
Zonne-energie
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1-9-2002
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ECN publicatienummer:
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Publicatie type:
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ECN-RX--02-038
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Conferentiebijdrage
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Aantal pagina's:
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Volledige tekst:
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8
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Download PDF
(104kB)
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Gepresenteerd op: 12th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Breckenridge CO, USA, 11-14 augustus 2002.
Samenvatting:
The Ribbon-Growth-on-Substrate (RGS) silicon wafer manufacturing technologyis a very promising high-speed wafer production technique under development
at the moment. It has the promise to lead to a manufacturing technology,
which allows silicon wafer manufacturing at the 25 MWp/a to 50 MWp/a
level.
A future development of this technology in the areas, RGS machine prototyping,
wafer quality improvement and solar cell process optimization should
lead to a commercialization of this technology in 2005.
In the following an outline of the past developments, a status of the
RGS technology today and the most probable road ahead is presented.
Terug naar overzicht.