ECN publicatie:
Inline processed flexible thin film silicon solar cells using linear PECVD sources
Gepubliceerd door: Publicatie datum:
ECN Zonne-energie 6-9-2010
ECN publicatienummer: Publicatie type:
ECN-M--10-023 Conferentiebijdrage
Aantal pagina's: Volledige tekst:
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Gepresenteerd op: 25th European Photovoltaic Solar Energy Conference and Exhibition - 5th World Conference on Photovoltaic Energy Conversion, Valencia, Spain, 6-10 september 2010.

Using linear VHF and RF PECVD plasma sources, we have deposited intrinsic and doped silicon layers for roll-to-roll fabrication of thin film silicon solar cells on flexible steel foil substrates. First amorphous silicon solar cells have been made using this PECVD system resulting in efficiencies up to 6.6%. Keywords: a-Si solar cells, in-situ monitoring and diagnostics, large area deposition

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