ECN publicatie:
IZO and ITO deposition by spray pyrolysis- influence of the growth conditions on the electical and optical properties
Gepubliceerd door: Publicatie datum:
ECN Zonne-energie 19-6-2006
ECN publicatienummer: Publicatie type:
ECN-RX--06-043 Conferentiebijdrage
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Gepresenteerd op: 6th International conference on coatings on glass and plastics, Dresden, Germany, 13-22 juni 2006.

Indium-doped Zinc Oxide (ZnO:In) has been prepared on glass substrates by spray pyrolysis in air at substrate temperatures of between 350 and 450°C. The spray has been generated by means of an ultrasonic nebulizer from a zinc acetate solution (0.1 M) with varying [In]/[Zn] ratio (1-5 at%). Using the ultrasonic nebulizer 1.3 µm thick ZnO:In layers with a resistivity as low as 3 have been deposited. The XRD spectrum shows a hexagonal zinc oxide structure. Unfortunately, the specular transmittance of a 1.3 µm thick layer in the visible spectrum is only 60 to 80%. In order to improve the optical properties, the effect of underlayers has been investigated. The application of 100 nm intrinsic ZnO (i-ZnO) underneath ZnO:In resulted in a change from a more granular to a dense columnar film structure. The XRD-spectrum still shows the typical diffraction pattern of hexagonal zinc oxide. As a result the specular transmittance and layer homogeneity of ZnO:In have improved without changing the layer conductivity, giving 1.3 µm thick TCO layers with a resistivity of 3 and a transmittance of more than 80% in the visible light range.

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