ECN publicatie:
In-situ measurements of surface (photo)voltage of roll-to-roll deposited thin film silicon solar cells
Gepubliceerd door: Publicatie datum:
ECN Zonne-energie 25-8-2009
ECN publicatienummer: Publicatie type:
ECN-M--09-112 Conferentiebijdrage
Aantal pagina's: Volledige tekst:
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Gepresenteerd op: International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS), Utrecht, The Netherlands, 24-28 augustus 2009.

The Kelvin probe is a non-contact, non-destructive vibrating capacitor device that measures the work function difference between a conducting sample and a vibrating tip. This contribution focuses on inline monitoring of the surface (photo) voltage of deposited silicon layers. We apply a custom-built in-situ Kelvin probe, operated in a roll-to-roll PECVD system, located immediately after the plasma zones to enable direct feedback to the controlling system of the plasma deposition. The surface photovoltage of nip thin film Si solar cells increases with increasing Voc. The results imply that inline, contactless meas-urements of the open circuit voltage are possible and that thus monitoring the doped layer quality during roll-to-roll production is feasible.

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