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Titel:
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Straightforward in-line processing for a 16.8% efficient mc-Si solar cell
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Auteur(s):
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Gepubliceerd door:
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Publicatie datum:
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ECN
Zonne-energie
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1-1-2005
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ECN publicatienummer:
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Publicatie type:
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ECN-RX--05-049
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Conferentiebijdrage
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Aantal pagina's:
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Volledige tekst:
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4
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Download PDF
(522kB)
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Gepresenteerd op: 31st IEEE Photovoltaic Specialists Conference, Orlando, FL, USA, 3-5 januari 2005.
Samenvatting:
A simple in-line industrial process has been developed
for commercial multicrystalline silicon (mc-Si) which results in solar
cells with an average efficiency of 16.5%. The best cell has an efficiency
of 16.8%. These are the highest efficiencies reported for full inline
processing. The process consists of an acidic etch for texturing, homogeneous
spin-on phosphorous and a belt furnace emitter diffusion, MicroWave
PECVD for silicon nitride layers, and screen-printed metallization.
The silicon nitride layer serves as antireflection coating and provides
bulk and surface passivation. Detailed characterization and computer
simulation showed that implementation of already proven technologies
in the current cell processing could lead to efficiencies close to 18%.
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