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Titel:
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Hydrogen passivation of iron in multicrystalline silicon
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Auteur(s):
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Gepubliceerd door:
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Publicatie datum:
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ECN
Zonne-energie
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1-8-2003
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ECN publicatienummer:
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Publicatie type:
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ECN-RX--03-055
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Conferentiebijdrage
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Aantal pagina's:
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Volledige tekst:
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4
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Download PDF
(512kB)
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Gepresenteerd op: 13th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Vail CO, USA, 10-13 augustus 2003.
Samenvatting:
Concentrations of interstitially dissolved Fe can be measured by lifetimemeasurements before and after dissociation of FeB pairs. It allows the
measurement of iron concentrations as low as 5x1010 cm-3. The technique
is applied to determine the change in Fe concentration after different
solar cell process steps. In particular, hydrogen passivation of iron
in multicrystalline silicon wafers is investigated. The results indicate
that the passivation can be accurately followed with this technique.
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